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Corrosion on silicon sensors
Veröffentlicht am 10.12.2006 in Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment Volume 569, Issue 1, Pages 80-83

The CMS tracking detector uses about 26 000 silicon sensors to equip206m2 of silicon. During our quality and process control, including long term testing of the silicon sensors, strange stains on the guard and bias rings have been observed. The result of a systematic investigation proved that our detectors are affected by Al2O3 corrosion after time under voltage in a humid environment. Depth profiling showed that the metal structures are compromised down to the level of SiO2. Finally, significant concentrations of potassium (K) were found precisely at the location of the corrosion, serving as a catalyst for the electrochemical reaction. A systematic study and origin of these stains will be presented.


Autoren: Thomas Bergauer, Manfred Krammer

weitere Autoren: F. Hartmann, J.C. Fontained, M. Frey, A. Furgeri


Kategorie: Reviewed Paper