Results from a first production of enhanced Silicon Sensor Test Structures produced by ITE Warsaw
Veröffentlicht am 01.09.2008 in
Monitoring the manufacturing process of silicon sensors is essential to ensure stable quality of the produced detectors. During the CMS silicon sensor production we were utilising small Test Structures (TS) incorporated on the cut-away of the wafers to measure certain process relevant parameters. Experience from the CMS production and quality assurance led to enhancements of these TS.
Another important application of TS is the commissioning of new vendors. The measurements provide us with a good understanding of the capabilities of a vendors process.
A first batch of the new TS was produced at the Institute of Electron Technology in Warsaw Poland. We will first review the improvements to the original CMS test structures and then discuss a selection of important measurements performed on this first batch.
Autoren: Thomas Bergauer, Marko Dragicevic, Josef Hrubec, Stephan Hänsel, Manfred Krammer
weitere Autoren: T. Bergauer, M. Dragicevic, M. Frey, P. Grabiec, S. Haensel, F. Hartmann, K. Hoffman, J. Hrubec, M. Krammer, K. Kucharski, A. Macciolo, J. Marcewski
Kategorie: Reviewed Paper