Process_Local_v_6			
03.10.2003			
		thin/low r (HPK1)	thin/low r (HPK234)	thick/high r (STM)
GLOBAL	tool_ID (city)	44
	controller (0=PC 1=MAC)	1
	stabilization_time [s]	10	10	10
	slow_slope [V/s]	5	5	5
	fast_slope [V/s]	20	20	20
IV	Vsource_compliance [uA]	100	100	100
CV	stray_capa [pF]	2.25	2.25	2.25
	Vsource_compliance [uA]	500	500	500
MOS	stray_capa [pF]	2.4	2.4	2.4
	Vsource_compliance [uA]	100	100	100
GCD	Vsource_compliance [uA]	100	100	100
R_poly	Vsource_compliance [uA]	100	100	100
R_alu	correct_R_1 [Ohm]	3.7	3.7	3.7
	correct_R_2 [Ohm]	3.9	3.9	3.9
	correct_R_3 [Ohm]	4.2	4.2	4.2
	square_number_1	1369	1369	1112
	square_number_2	561	561	511
	square_number_3	222	222	210
	Vsource_compliance [uA]	10000	10000	10000
R_p+	square_number_1	727	727	872
	square_number_2	399	399	438
	square_number_3	172	172	179
	Vsource_compliance [uA]	500	500	500
C_ac	stray_capa_cc1 [pF]	2.30	2.30	2.30
	stray_capa_cc2 [pF]	6.74	6.74	6.74
	stray_capa_cc3 [pF]	4.40	4.40	4.40
	stray_capa_cc4 [pF]	3.97	3.97	3.97
	stray_capa_cc5 [pF]	3.29	3.29	3.29
	stray_capa_cc6 [pF]	2.68	2.68	2.68
C_int	stray_capa [pF]	1.12	1.12	1.12
	Vsource_compliance [uA]	100	100	100
R_int	Vsource_compliance [uA]	100	100	100
IV dielectric	Vsource_compliance [uA]	100	100	100
[End_of_Local_Input_File]